发明名称 |
Method for double-side vacuum film formation and laminate obtainable by the method |
摘要 |
The film formation method comprises the steps of: unrolling and feeding an elongated substrate wound in a roll form from a first roll chamber in a direction from the first roll chamber toward a second roll chamber, using a first surface as a surface for film formation; degassing the fed substrate; forming a first material film on the first surface of the degassed substrate in a first film formation chamber; forming a second material film on the first material film in a second film formation chamber; taking up the substrate in a roll form in the second roll chamber, the substrate having the material films formed thereon; unrolling and feeding the taken up substrate from the first roll chamber in the direction, using a second surface opposite the first surface of the substrate as a surface for film formation; and repeating all the above treatments. |
申请公布号 |
EP2551371(A1) |
申请公布日期 |
2013.01.30 |
申请号 |
EP20120178230 |
申请日期 |
2012.07.27 |
申请人 |
NITTO DENKO CORPORATION |
发明人 |
NASHIKI, TOMOTAKE;SUGAWARA, HIDEO;YAGURA, KENKICHI;HAMADA, AKIRA;ITO, YOSHIHISA;ISHIBASHI, KUNIAKI;SAKATA, YOSHIMASA |
分类号 |
C23C14/02;C23C14/56 |
主分类号 |
C23C14/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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