发明名称 Method for double-side vacuum film formation and laminate obtainable by the method
摘要 The film formation method comprises the steps of: unrolling and feeding an elongated substrate wound in a roll form from a first roll chamber in a direction from the first roll chamber toward a second roll chamber, using a first surface as a surface for film formation; degassing the fed substrate; forming a first material film on the first surface of the degassed substrate in a first film formation chamber; forming a second material film on the first material film in a second film formation chamber; taking up the substrate in a roll form in the second roll chamber, the substrate having the material films formed thereon; unrolling and feeding the taken up substrate from the first roll chamber in the direction, using a second surface opposite the first surface of the substrate as a surface for film formation; and repeating all the above treatments.
申请公布号 EP2551371(A1) 申请公布日期 2013.01.30
申请号 EP20120178230 申请日期 2012.07.27
申请人 NITTO DENKO CORPORATION 发明人 NASHIKI, TOMOTAKE;SUGAWARA, HIDEO;YAGURA, KENKICHI;HAMADA, AKIRA;ITO, YOSHIHISA;ISHIBASHI, KUNIAKI;SAKATA, YOSHIMASA
分类号 C23C14/02;C23C14/56 主分类号 C23C14/02
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