| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator, along with a manufacturing method thereof, an optical scanner, and an image forming apparatus, capable of maintaining a conductive state and exhibiting reliability for extended hours. <P>SOLUTION: The actuator 1 includes a movable plate 21, a support part 22, connecting parts 23 and 24 for connecting the movable plate 21 to the support part 22, and a pair of electrode layers 512 and 513 so provided as to sandwich a piezoelectric layer 511 and a piezoelectric layer 511. It includes a piezoelectric element 51 where the electrode layer 512 is jointed to the connecting part 23, and a wiring substrate 61 that is fixed to the support part 22. Each of the pair of electrode layers 512 and 513 is conductive to a wiring on the wiring substrate 61 by way of conductive bumps 711 and 721 that are shrinkable. <P>COPYRIGHT: (C)2008,JPO&INPIT |
