| 摘要 |
According to one embodiment, a pattern forming method is disclosed. The method includes contacting a template with light curable resin on a substrate. The template comprises a concave-convex pattern including concave portions and convex portions, and a metal layer provided on a convex portion of the concave-convex pattern. The concave-convex pattern is to be contacted with the light curable resin. The pattern forming method further includes irradiating the light curable resin with light of a predetermined wavelength under a condition &egr;1=−2&egr;2. Where &egr;1 is a complex relative permittivity of the metal layer corresponding to the predetermined wavelength, &egr;2 is a complex relative permittivity of the light curable resin corresponding to the predetermined wavelength. |
