IMPROVED COATING APPARATUS AND COATING METHOD

摘要

PURPOSE: An improved coating apparatus and a coating method are provided to remarkably reduce installation cost and to not generate dead region of a substrate. CONSTITUTION: A coating apparatus(200) comprises a jig(240), a suction table(212), a nozzle apparatus(220), and a gantry. The jig comprises a plurality of accommodating part(242) which accommodates a plurality of substrates(Ga,Gb,Gc), and a plurality of outlets(244). The outlets eject the substrates and are placed in the lower part of the accommodating parts. The jig is mounted to the suction table. The nozzle apparatus coats the whole side of the substrates with a coating solution and is placed on the suction table. The nozzle apparatus is mounted to the gantry. The gantry has the nozzle apparatus move back and forth on the jig.