发明名称 METALLIZATION PROCESSES, MIXTURES, AND ELECTRONIC DEVICES
摘要 <p>One aspect of the present invention is a method of processing a substrate. In one embodiment, the method comprises forming an electrical conductor on or in the substrate by providing a mixture comprising metal particles and an electroless deposition solution and electrolessly depositing a metal matrix and co-depositing the metal particles. In another embodiment, the method comprises forming an electrical conductor on or in the substrate by providing a mixture comprising metal particles and an electrochemical plating solution and electrochemically plating a metal matrix and co-depositing the metal particles. Another aspect of the present invention is a mixture for the formation of an electrical conductor on or in a substrate. Another aspect of the present invention is an electronic device.</p>
申请公布号 SG186359(A1) 申请公布日期 2013.01.30
申请号 SG20120092235 申请日期 2011.07.01
申请人 LAM RESEARCH CORPORATION 发明人 KOLICS, ARTUR;REDEKER, FRITZ
分类号 主分类号
代理机构 代理人
主权项
地址