Method of controlling pressure in picker to perform pick and place process on semiconductor device and method of determining control parameters to perform the same

摘要

PURPOSE: A picker pressure control method for performing a pick and place process with respect to a semiconductor device and a control variable setting method for the same are provided to prevent an overshoot phenomenon in a change of picker pressure by providing a fixed amount of air. CONSTITUTION: A vacuum environment is provided for a picker(20) in order to lift a semiconductor device(10). The vacuum environment is provided from a vacuum module(120). A fixed amount of air is provided to the picker in order to put down the semiconductor device. The fixed amount of air is provided from a pressure container(140). The pressure container is connected to a pneumatic module(130) for providing compressed air.