摘要 |
The module has a cavity (HR2) formed between a base plate (BP) and a cover. The plate has an acoustic channel whose one end opens out to the cavity. The other end of the channel is closed by a microphone chip. The chip is arranged in another cavity connected with outer space. The chip has a diaphragm which separates the cavity (HR1) from the channel. The cover has a separating bar which separates the two cavities from one another. |