PROTECTION LAYER OF HYDROGEN MEMBRANE AND PREPARATION METHOD THEREOF

摘要

PURPOSE: A separation film protective layer and a manufacturing method thereof are provided to prevent deformation or destruction of a separation film by a particle which can be contained in gas during many processes using a hydrogen separation film, and to strengthen competitiveness with improved durability by a high priced separation film. CONSTITUTION: A cermet type separation protective layer(210) is formed by coating a dense hydrogen separation layer(204) with a metal and a ceramic which cannot move hydrogen molecules and atoms along the surface. The thickness of the separation protective layer is 50nm-3Mm, and the average diameter of the coated metal and ceramic is 5nm-2Mm. The porosity of the separation film protective layer is 5-50%. The ceramic composition includes an oxide, a non-oxide, and a nitride system, or the mixture thereof. The cermet has a column shape. An air gap is formed between the cermet. A part of the surface of the dense hydrogen separation layer is exposed.