WAFER CARRIER

摘要

PURPOSE: A wafer carrier is provided to improve air circulation by forming a gas dispersion path and a gas discharge hole on a gas distribution cover. CONSTITUTION: The body of a wafer carrier includes a holding space for wafers, a gas supplying hole(11) and a gas discharge hole(12). A cover(20) closes the opening part of the body. The cover has a groove. The cover includes a dispersion path cover plate having gas discharge holes. The gas discharge holes supply a substitution gas supplied through the gas distribution path to each wafer.