Method of presuming interior situation of process chamber and storage medium

摘要

A method of presuming interior situation of process chamber that makes it possible to accurately presume the interior situation of a process chamber using the number of particles discharged from the interior of the process chamber. Characteristic values associated with respective particle removing modes of a particle removing sequence are extracted from time-series data on the number of particles discharged from the interior of the process chamber in which a substrate is accommodated and subjected to predetermined processing and to which the particle removing sequence is applied, and the relationship between the extracted characteristic values and the interior situation of the process chamber is calculated. The interior situation of the process chamber is presumed based on the calculated relationship and the characteristic values in new time-series data on the number of particles.