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发明名称
METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH1092842(A)
申请公布日期
1998.04.10
申请号
JP19960239056
申请日期
1996.09.10
申请人
HITACHI LTD
发明人
OSHIKA KATSUSHI
分类号
H01L21/302;H01L21/306;H01L21/338;H01L29/812;(IPC1-7):H01L21/338
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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