发明名称 TEST APPARATUS, TEST METHOD AND DEVICE INTERFACE
摘要 PURPOSE: A testing apparatus, a testing method, and a device interface are provided to easily adjust an optical IO of a device under test which has a testing apparatus and a light interface. CONSTITUTION: A testing apparatus(100) comprises a substrate(110), a pressing unit(130), and an optical transmission line(140). A substrate loads a tested device. An optical transmission line is connected to an optical coupler. A pressure unit pressurizes an optical transmission line with a first recess from the substrate. [Reference numerals] (10) Device to be tested; (110) Substrate; (120) Gas supply unit; (150) Optical communication unit; (160) Electric communication unit; (170) Moving unit; (180) Control unit
申请公布号 KR101227462(B1) 申请公布日期 2013.01.29
申请号 KR20110106402 申请日期 2011.10.18
申请人 ADVANTEST CORPORATION 发明人 MASUDA SHIN
分类号 G02B6/42 主分类号 G02B6/42
代理机构 代理人
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