发明名称 |
Removal of surface oxides by electron attachment |
摘要 |
Described herein are a method and an apparatus for removing metal oxides from a substrate surface within a target area. In one particular embodiment, the method and apparatus has an energizing electrode which has an array of protruding conductive tips that are electrically connected by a conductive wire and separated into a first electrically connected group and a second electrically connected group wherein at least a portion of the conductive tips are activated by a DC voltage source that is negatively biased to generate electrons within the target area that attach to at least a portion of a reducing gas that is present in the target area to form a negatively charged reducing gas that contacts the treating surface to reduce the metal oxides on the treating surface of the substrate.
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申请公布号 |
US8361340(B2) |
申请公布日期 |
2013.01.29 |
申请号 |
US20090433108 |
申请日期 |
2009.04.30 |
申请人 |
AIR PRODUCTS AND CHEMICALS, INC.;DONG CHUN CHRISTINE;PATRICK RICHARD E.;ARSLANIAN GREGORY KHOSROV;GHOSH RANAJIT |
发明人 |
DONG CHUN CHRISTINE;PATRICK RICHARD E.;ARSLANIAN GREGORY KHOSROV;GHOSH RANAJIT |
分类号 |
C25F1/00;C25F7/00 |
主分类号 |
C25F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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