发明名称 |
Laser diode array, method of manufacturing same, printer, and optical communication device |
摘要 |
A method of manufacturing a laser diode array capable of inhibiting electric cross talk is provided. The method of manufacturing a laser diode array includes a processing step of forming a peel layer containing an oxidizable material and a vertical resonator structure over a first substrate sequentially from the first substrate side by crystal growth, and then selectively etching the peel layer and the vertical resonator structure to the first substrate, thereby processing into a columnar shape, a peeling step of oxidizing the peel layer from a side face, and then peeling the vertical resonator structure of columnar shape from the first substrate, and a rearrangement step of jointing a plurality of vertical resonator structures of columnar shape obtained by the peeling step to a surface of a metal layer of a second substrate formed with the metal layer on the surface.
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申请公布号 |
US8363689(B2) |
申请公布日期 |
2013.01.29 |
申请号 |
US201113064218 |
申请日期 |
2011.03.11 |
申请人 |
SONY CORPORATION;MAEDA OSAMU;SHIOZAKI MASAKI;ARAKIDA TAKAHIRO |
发明人 |
MAEDA OSAMU;SHIOZAKI MASAKI;ARAKIDA TAKAHIRO |
分类号 |
H01S5/187 |
主分类号 |
H01S5/187 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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