发明名称 Laser diode array, method of manufacturing same, printer, and optical communication device
摘要 A method of manufacturing a laser diode array capable of inhibiting electric cross talk is provided. The method of manufacturing a laser diode array includes a processing step of forming a peel layer containing an oxidizable material and a vertical resonator structure over a first substrate sequentially from the first substrate side by crystal growth, and then selectively etching the peel layer and the vertical resonator structure to the first substrate, thereby processing into a columnar shape, a peeling step of oxidizing the peel layer from a side face, and then peeling the vertical resonator structure of columnar shape from the first substrate, and a rearrangement step of jointing a plurality of vertical resonator structures of columnar shape obtained by the peeling step to a surface of a metal layer of a second substrate formed with the metal layer on the surface.
申请公布号 US8363689(B2) 申请公布日期 2013.01.29
申请号 US201113064218 申请日期 2011.03.11
申请人 SONY CORPORATION;MAEDA OSAMU;SHIOZAKI MASAKI;ARAKIDA TAKAHIRO 发明人 MAEDA OSAMU;SHIOZAKI MASAKI;ARAKIDA TAKAHIRO
分类号 H01S5/187 主分类号 H01S5/187
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