Shear force detection device, tactile sensor and grasping apparatus

摘要

A shear force detection device for detecting a shear force includes: a support body including an opening defined by a pair of straight parts perpendicular to a detection direction of the shear force and parallel to each other; a support film on the support body and closing the opening, the support film having flexibility; a piezoelectric part on the support film and extending astride an inside and outside of the opening and along at least one of the pair of straight parts of the opening when viewed in a plane in which the support body is seen in a substrate thickness direction, the piezoelectric part being bendable to output an electric signal; and an elastic layer covering the piezoelectric part and the support film.