| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of creating a three-dimensional profile map for displaying height information of a sample in order to obtain one two-dimensional synthetic image, where all regions come into focus, by using an optical microscope to obtain a number of images with different focal distances with respect to one stereoscopic sample and combining these images. SOLUTION: A sample is imaged from different heights to obtain two-dimensional sample images of different focused portions and in a detailed sub-band obtained by performing discrete wavelet transformation, an initial height map is created in an imaging height of an image indicating a maximum detailed sub-band coefficient value. In each of input images, a focusing degree is computed, height information of a pixel at a non-focused point (non-boundary point) is removed by filtering, and a height of the removed pixel (non-boundary point) is calculated by interpolation from a height value of a pixel (boundary point) passing filtering. Then, a height map is created by substituting the height calculated by the interpolation to the pixel from which the height information has been removed. COPYRIGHT: (C)2013,JPO&INPIT |
