| 摘要 |
PURPOSE: A carrier transfer method and a vacuum processing apparatus using the same are provided to arrange a vertical carrier transfer apparatus and horizontal carrier transfer apparatus in a transfer chamber, thereby precisely transferring a carrier from a first rail to a second rail. CONSTITUTION: A carrier(10) is inputted to the inside of a transfer chamber through a first rail including a plurality of rollers. The carrier and a first rail(110) are descended as a first time. The first rail is descended as a second time. The carrier is transferred to a second rail(120) which is arranged by being separated from the first rail. The second rail is ascended as a first time. The carrier and second rail are ascended as a second time. |
