| 摘要 |
The present invention provides for an irradiation system with an ion beam/charged particle beam having an energy filter (17) formed by deflection electrodes (24-1, 24-2) and a deflection magnet (22) and means for switching therebetween wherein the deflection magnet has a general window-frame shape and is formed with a hollow portion at its centre and the deflection electrodes are installed, along with suppression electrodes (31-1, 31-2), in a vacuum chamber (23) arranged in the hollow portion of the deflection magnet. The deflection electrodes are installed with respect to the deflection magnet such that a deflection trajectory of a beam caused by a magnetic field and a deflection trajectory of a beam caused by an electric field overlap each other and since the deflection electrodes or the deflection magnet can be selectively used by way of a switching means the system can function with a wide range of beam conditions and thus is widely usable. |
