| 摘要 |
PURPOSE: A growth apparatus for a single crystal is provided to control a heater part of the crucible outside and the speed of crystal growth through the adjustment of a heat exchanger of the crucible bottom. CONSTITUTION: A groove is formed in order to fix a seed crystal to the inside bottom surface. A heater part(120) is contiguous to the outside of a crucible(110) and is formed. A heat exchanger(130) circulates refrigerant to the groove of the crucible bottom and cools the crucible bottom. A growth container(140) includes the crucible, the heater part, and the heat exchanger in inner part. A crucible up and down motion part(150) moves the crucible to vertical direction in the growth container. |
