| 摘要 |
The invention provides for a method to increase low-energy beam current applied to an ion beam irradiation system comprising a beam generation source (1), a mass analysis device (3), a beam transformer, a deflector (7) for scanning, a beam collimating device (10), an acceleration/deceleration device (11,12), and an energy filtering device (18), wherein the beam transformer comprises a vertically focusing DC quadrupole electromagnet QD (5) and a horizontally focusing DC quadrupole electromagnet QF (6) and the beam transformer is arranged to transform a beam having a circular cross-section or an elliptical or oval cross-section such that said beam has an elliptical or oval cross-section that is long in the scan direction in the entire region of the beam line after deflection for scanning. |
