发明名称 Apparatus for eliminating waste gases by plasmas
摘要 PURPOSE: A powder processing device using plasma is provided to chemically or thermally dissolve or reduce powder or reaction materials into stable materials using a plasma reaction device. CONSTITUTION: A reaction chamber(10) is located between a powder generating device and a vacuum pump. A microwave module(20) is connected to the reaction chamber and generates plasma in the reaction chamber. A top plate(40) is located on the upper side of the generated plasma. The top plate passes the powder and traps the generated plasma in the reaction chamber. A bottom plate(30) is located on the lower side of the generated plasma. The bottom plate traps the powder passing through the plasma and stably maintains the generated plasma. [Reference numerals] (AA) Cooling water IN; (BB) Cooling water OUT
申请公布号 KR101219302(B1) 申请公布日期 2013.01.25
申请号 KR20110059511 申请日期 2011.06.20
申请人 发明人
分类号 H01L21/02;H01L21/205;H01L21/3065 主分类号 H01L21/02
代理机构 代理人
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