| 摘要 |
PURPOSE: A sterilization device is provided to increase the temperature inside a chamber by heated liquid. CONSTITUTION: A sterilization device comprises a chamber(10), a decompression unit(20), a mixture gas supply unit(30), a plasma generation unit(40), and an external air supply unit(50). The chamber provides a space for storing a material to be sterilized and can be heated, sealed, and exhausted of gas to maintain temperature and pressure. The decompression unit comprises a decompression pump and a ventilation control valve. A sterilization gas supply unit supplies the mixture gas of sterilization gas and external air to a chamber. The plasma generation unit includes a power supply source and an electrode. The external air supply unit increases the pressure of the chamber by supplying external air to the chamber. |
