| 摘要 |
A magnetron-type hollow cold cathode relates to electronics and can be used in devices with , if discharge ignition is required under lower pressure. The hollow cold cathode is made as an aluminum cylindrical tube with a coaxial internally installed central electrode connected to a discharge gap anode via a resistance which is greater than discharge ballast resistance and which is located in longitudinal uniform magnetic field. An auxiliary cylindrical electrode is incorporated, whose diameter is greater than the diameter of cylindrical aluminum tube, which is located outside of aluminum cylindrical tube and coaxially thereto, and electrically connected to the anode via the resistance, which is greater than discharge ballast resistance. The technical result is use of external surface of cylinder-cathode in glow discharge devices under low pressure that allows one for example to realize method for obtaining thin films and covering via thermal evaporation in plasma discharge for the purpose to improve thereof adhesion and electro-physical properties. |
