| 摘要 |
PURPOSE: A substrate transport apparatus is provided to improve convenience for workers by separating only the decelerator from a substrate transport apparatus. CONSTITUTION: An arm unit(20) is rotatably connected with an installation unit(10). The arm unit includes an arm(210) and a vertical guider(260). A movable up-down elevating unit(30) is installed on the vertical guider. The elevating unit includes an up-down moving unit(310) and a horizontal guider(320). The horizontal guider leads horizontal moving of an effector support unit(40) supporting an end effector(50). |
