| 摘要 |
<P>PROBLEM TO BE SOLVED: To measure, with high responsiveness and high accuracy, the concentration, amount, and the like of various substances to be measured contained in circulated gas. <P>SOLUTION: A substance measuring device comprises: plasma generation means for generating plasma in a measurement area; laser radiation means for radiating laser beam in the measurement area, which has an excitation wavelength of substance to be measured that is excited by the plasma; current detection means for detecting the electric characteristics caused by the plasma generated in the measurement area, by means of electric current; an analysis device for detecting the substance to be measured contained in circulated gas based on the electric current value detected by the current detection means; and a control device for controlling the plasma generation means, the laser radiation means and the operation of the analysis device. By comparing the electric current value detected by the current detection means in a situation where plasma with a set strength is generated in the measurement area and the laser beam having the excitation wavelength of the substance to be measured that has been excited by the plasma is radiated, and an electric current value detected by the current detection means in other situations, the substance to be measured contained in the circulated gas is detected. <P>COPYRIGHT: (C)2013,JPO&INPIT |
