| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heat-treatment furnace and a support member for a heat-treatment furnace which can prevent downward movement of a resistance-heating element while allowing movement in a radial direction involved in thermal expansion and contraction of the resistance-heating element, and allow improvement in durability of the resistance-heating element. <P>SOLUTION: A heat-treatment furnace comprises: a cylindrical heat-insulating material surrounding a process container 3 for performing a thermal treatment on a workpiece loaded therein; a spiral resistance-heating element arranged along an inner peripheral face of the heat-insulating material; and a plurality of support members 13 which are provided in the inner peripheral face of the heat-insulating material with a predetermined pitch in an axial direction and which support the resistance-heating element so as to allow thermal expansion and contraction in a radial direction. The support member 13 has a leading end portion embedded in the heat-insulating material, a horizontal part 13a for slidably supporting the resistance-heating element on its upper face, and a vertical part 13b upstanding from a rear end of the horizontal part 13a. The horizontal part 13a has a groove 18 formed in its lower face along a longitudinal direction thereof for reducing the thermal capacity of the support member 13. <P>COPYRIGHT: (C)2013,JPO&INPIT |
