| 摘要 |
<P>PROBLEM TO BE SOLVED: To propose a magnet unit, magnetic field generator, and magnetron sputtering apparatus allowing a magnetic track to be easily changed without taking time and effort and also allowing for cost reduction. <P>SOLUTION: By configuring the magnet unit to have different magnetic poles, to be provided with a second magnet 22 rotatably supported by a magnetic plate 20, to change the magnetic poles by rotating the second magnet 22, and to change a shape of the magnetic track JT formed on a surface of a target 13, the shape of the magnetic track JT can be changed to an optimal shape without removing the magnetic poles arranged on the magnetic plate 20, whereby the magnetic track JT can be easily changed without taking time and effort to remove the magnetic poles and the cost reduction can be achieved accordingly. <P>COPYRIGHT: (C)2013,JPO&INPIT |
