INDEX ERROR ESTIMATING APPARATUS, INDEX ERROR CALIBRATING APPARATUS, AND INDEX ERROR ESTIMATING METHOD

摘要

An index error estimating apparatus used for an index error calibrating apparatus that has a grating disk supported by a rotation shaft and four detectors arranged on the grating disk. The index error estimating apparatus includes a detected value synthesizer that calculates a linear sum by multiplying by a predetermined coefficient each of detected values obtained from each of the at least four detectors; and a Fourier component identifier that uses a Fourier component of the linear sum and identifies a Fourier component of the index error.