| 摘要 |
A metrology apparatus including a body and a first member rotatable relative to the body about a first axis of rotation, said first axis being defined by first bearing and a first motor for actuating rotation of the first member relative to the body about the first axis of rotation. A surface sensing device is attachable to the first member such that the surface sensing device can move with the first member, relative to the body. The first motor may include a first magnet and at least one metal coil spaced apart along the first axis and mounted such that the first magnet and the at least one metal coil are moveable relative to one another.
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