| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pattern formation apparatus and a painting development apparatus, being advantageous in improvement of a transfer throughput of a substrate between the pattern formation apparatus and the painting development apparatus. <P>SOLUTION: The pattern formation apparatus performs delivery of a substrate to/from an adjoining painting development apparatus. A first control part on the pattern formation apparatus side, when starting a pattern formation process on a substrate, transmits a first signal (S41-2) which predicts a new substrate delivery to a second control part on the painting development apparatus side at the time when operation of a first transfer hand 35 is started or thereafter, and which causes starting of operation of a second transfer hand 52 in advance. During operation of the second transfer hand 52, the first control part transmits a second signal (S41-4) requiring operation of the second transfer hand 52. <P>COPYRIGHT: (C)2013,JPO&INPIT |
