| 摘要 |
A gas scrubber used in fabricating semiconductor devices and a filtering method using the same are provided. The gas scrubber contains a flange having an inlet on the upper surface thereof, a hollow housing combined at one end with the outer circumferential surface of the flange, a cup-shaped filter housed inside the hollow housing, for filtering impurities flowing through the inlet, and pillar type filter supporters mounted on the lower surface of the flange, for maintaining the shape of the filter. Here, powders to be filtered are filtered by passing from the exterior of the filter to the interior thereof and the shape of the filter is maintained by the pillar type filter supporters. Thus, the life of the filter can be prolonged so that the costs of manufacturing a semiconductor device are reduced.
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