INSPECTION METHOD AND INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To solve a problem occurring when matching a beam to an object in analysis based on an X-ray.

SOLUTION: An inspection method includes a step of irradiating a sample by using an X-ray beam to be focused on the surface of the sample for designating a spot. At least one of the sample and the X-ray beam is shifted for performing scan with the spot along a scanning path traversing feature points of the surface. At a plurality of locations along the scanning path where the spot has overlap with the feature points of individually different levels, respective intensity values of fluorescent X-ray radiated from the sample in response to the X-ray beam are measured. Respective intensity values measured at the plurality of locations are processed for calculating adjustment values for the radiated fluorescent X-ray in the scanning path. Thicknesses of the feature points are estimated on the basis of the adjusted values.

COPYRIGHT: (C)2013,JPO&INPIT