MANUFACTURING APPARATUS FOR DEPOSITING A MATERIAL ON A CARRIER BODY
摘要
A gasket is used in a manufacturing apparatus, which deposits a material on a carrier body. A reaction chamber is defined by a housing and a base plate of the manufacturing apparatus. The gasket is disposed between the housing and the base plate for preventing a deposition composition, which comprises the material to be deposited or a precursor thereof, from escaping the reaction chamber. The gasket comprised a flexible graphite material for preventing the gasket from contaminating the material within said reaction chamber.
申请公布号
WO2013012422(A1)
申请公布日期
2013.01.24
申请号
WO2011US44695
申请日期
2011.07.20
申请人
HEMLOCK SEMICONDUCTOR CORPORATION;ANDERSON, MICHAEL, L.;TROMBLEY, STEPHEN