| 摘要 |
<P>PROBLEM TO BE SOLVED: To maintain excellent drawing accuracy by decreasing a data rate of a control signal to control a blanking deflection part. <P>SOLUTION: A drawing apparatus drawing a pattern on a substrate by using a plurality of charged particle beams includes: a blanking deflection part having a plurality of deflectors deflecting the plurality of charged particle beams respectively and performing irradiation or non-irradiation of the charged particle beams by the respective driving of the plurality of deflectors; and a blanking control part transmitting a control signal to control the blanking deflection part to the blanking deflection part. The blanking deflection part includes: a storage part storing pattern data indicating a drawing pattern; a generation part acquiring position information designating a drawing position of the drawing pattern and generating a blanking signal to draw the drawing pattern on the drawing position designated by the acquired position information from the pattern data stored in the storage part; and a driving part driving the plurality of deflectors in accordance with the blanking signal. <P>COPYRIGHT: (C)2013,JPO&INPIT |
