| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate alignment method capable of accurately aligning a roughly circular substrate with at least two straight parts formed at a peripheral edge part. <P>SOLUTION: The substrate alignment method for aligning a roughly circular substrate with at least two straight parts formed at a peripheral edge part includes steps of: acquiring signals from a light receiving part which has received light emitted toward the peripheral edge part of the substrate while rotating the substrate by a holding and rotating part which holds and rotates the substrate, and associating the strength of the acquired signals and the rotation angle of the substrate; detecting two rotation angle sections to correspond to the two straight parts on the basis of the change of the strength of the signals; obtaining an angle difference between the two rotation angle sections on the basis of the rotation angle associated with the strength of the signals; determining whether or not the angle difference is settled within a prescribed range; and determining that the two rotation angle sections are comparable to the two corresponding straight parts when it is determined that the angle difference is settled within the prescribed range in the determining step. <P>COPYRIGHT: (C)2013,JPO&INPIT |
