| 摘要 |
Semiconductor devices and methods for making such devices are described. The semiconductor devices contain an epitaxial layer made by providing a semiconductor substrate containing an upper surface with a single-crystal structure; forming a layer on the upper surface of the substrate, wherein the layer comprises substantially the same material as the semiconductor substrate and comprises an amorphous or polycrystalline structure; and heating the layer using low temperature microwaves to change the amorphous structure to a single-crystal structure. The epitaxial layer can also be made by providing the semiconductor substrate with an upper surface of a single-crystal material and then forming an epitaxial layer on the substrate upper surface using microwaves at a wafer temperature less than about 550° C. In-situ or implanted dopants in the epitaxial layer can be activated using the same, or separate, low temperature microwave processing. Other embodiments are described.
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