| 摘要 |
<p>This exposure device exposes a substrate to exposure light through a liquid. This exposure device is provided with: an optical member that has an emission surface from which the exposure light is emitted; a substrate holding device which comprises a first holding part that holds the lower surface of the substrate in a releasable manner and a first member that defines an opening, in which the substrate can be arranged, and has an upper surface that is arranged around the upper surface of the substrate in a state where the substrate is held by the first holding part; and a porous member at least a part of which is arranged in a space between the substrate and the first member and which has an upper surface that is liquid repellent with respect to the liquid. The exposure device recovers, through the porous member, at least some of the liquid flowed into the space.</p> |
