发明名称 |
SAW FOR CUTTING SILICON INTO SEED RODS FOR USE IN A CHEMICAL VAPOR DEPOSITION POLYSILICON REACTOR |
摘要 |
<p>Saw for cutting silicon into seed rods for use in a chemical vapor deposition polysilicon reactor Systems and methods are provided for cutting silicon into seed rods for use in a chemical vapor deposition polysilicon reactor. A method includes cutting the silicon ingot with saw blades into silicon slabs, rotating the silicon slabs, and cutting the silicon slabs into smaller-sized silicon seed rods for use in the chemical vapor deposition polysilicon reactor.</p> |
申请公布号 |
WO2013010943(A1) |
申请公布日期 |
2013.01.24 |
申请号 |
WO2012EP63799 |
申请日期 |
2012.07.13 |
申请人 |
MEMC ELECTRONIC MATERIALS S.P.A.;BOVO, RODOLFO;MOLINO, PAOLO |
发明人 |
BOVO, RODOLFO;MOLINO, PAOLO |
分类号 |
B28D5/02 |
主分类号 |
B28D5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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