| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a hard film on the track face or on the rolling face of a bearing part made from bearing steel, formable of a hard film of sufficient durability in a high load environment. <P>SOLUTION: The method for forming a DLC (diamond-like carbon) film 5 comprised of carbon, silicon and hydrogen on a track groove 1a of an upper race 1 and on a track groove 2a of a lower race 2, employs an unbalanced magnetron sputtering process wherein methane gas and argon gas are introduced, using a silicon target and a carbon target. The temperature of a heater heating a specimen support table in the sputtering device is controlled to keep the temperature of the track grooves 1a, 2a of the upper and lower races 1, 2 supported by the specimen support table in a range of 150 to 180°C. The time of forming the film is set so that the thickness of the DLC film 5 becomes 1.0 to 1.6 μm. <P>COPYRIGHT: (C)2013,JPO&INPIT |
