| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing an MoTi target material having uniform fine structure with good dispersibility of Mo, and MoTi target material. <P>SOLUTION: This production method for the MoTi target material comprises (1) a step of preparing Mo powder by disintegrating an Mo aggregate, where Mo primary particles are aggregated, to ≤10 μm; (2) a second step of preparing mixed powder by mixing the Mo powder with Ti powder with average particle diameter of ≤50 μm; and (3) a step of preparing an MoTi sintered compact by compressing and sintering the mixed powder. <P>COPYRIGHT: (C)2013,JPO&INPIT |
