| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus and method for reducing influence of a magnetic interference field to a sample observation area in an electron microscope. <P>SOLUTION: In a system 40 for magnetic field compensation, a chamber wall 21 of a sample chamber 20 in an electron microscope 10 is provided with an area to accommodate compensation coils 41 in each of directions X, Y, Z, and a magnetic field sensor 42 measures an external magnetic interference field in sensitive regions in the vicinity of a lens aperture 18 and a sample 30, to adjust and compensate for a magnetic field of each of the compensation coils 41. <P>COPYRIGHT: (C)2013,JPO&INPIT |
