| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent hydrogen chloride from tailing in gas chromatographic separation. <P>SOLUTION: In the present invention, as a stationary phase a nonpolar silicone oil supported on a fluorinated saturated hydrocarbon resin which may have an ether chain in a part thereof is usable as a column for gas chromatography. The use of the column inhibits the tailing of hydrogen chloride, the tailing remarkably occurring with a conventional column, and allows each component of silanes or chlorosilanes to be separated in gas chromatographic separation of silanes or chlorosilanes such as monosilane, monochlorosilane, disilane, trichlorosilane, or tetrachlorosilane, which contain relatively large amount of hydrogen chloride. Consequently, the quantitative analysis of silanes or chlorosilanes using gas chromatography improves substantially in accuracy. <P>COPYRIGHT: (C)2013,JPO&INPIT |
