VIBRATION POWER GENERATION DEVICE AND METHOD OF MAKING THE SAME

摘要

Disclosed is a vibration power generation device which is provided with: a frame section; a weight section provided inside the frame section; a flexure section that is joined between the frame section and the weight section and is configured to bend in response to a displacement of the weight section; and a power generation section that is located at least at the flexure section and configured to generate an alternating-current voltage in response to a vibration of the weight section. The frame section and the weight section are formed of a silicon substrate. The power generation section comprises, at its own surface, an elastic film formed of a resin material. The flexure section comprises the elastic film formed of the resin material having a Young's modulus smaller than that of silicon forming the frame section and the weight section.