| 摘要 |
Disclosed is a micro viscometer comprising a body including an inlet where a fluid flows in, an outlet where the fluid flows out, a first chamber and a second chamber that is connected to the inlet and the outlet, respectively, a substrate and a cover that partition multiple micro channels that connect the first chamber and the second chamber; a first thin film that vibrates with the fluid within the first chamber and locates on the side of the first chamber; a second thin film that vibrates with the fluid within the second chamber and locates on the side of the second chamber; an actuating part that applies vibration onto the fluid within the first chamber by conducting vibration through the first thin film; a sensing part that senses vibration or pressure onto the fluid that transfers through the micro channels to the second thin film through vibration of the first thin film.
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