发明名称 Laser With High Quality, Stable Output Beam, And Long Life High Conversion Efficiency Non-Linear Crystal
摘要 A mode-locked laser system operable at low temperature can include an annealed, frequency-conversion crystal and a housing to maintain an annealed condition of the crystal during standard operation at the low temperature. In one embodiment, the crystal can have an increased length. First beam shaping optics can be configured to focus a beam from a light source to an elliptical cross section at a beam waist located in or proximate to the crystal. A harmonic separation block can divide an output from the crystal into beams of different frequencies separated in space. In one embodiment, the mode-locked laser system can further include second beam shaping optics configured to convert an elliptical cross section of the desired frequency beam into a beam with a desired aspect ratio, such as a circular cross section.
申请公布号 US2013021602(A1) 申请公布日期 2013.01.24
申请号 US201213412564 申请日期 2012.03.05
申请人 KLA-TENCOR CORPORATION;DRIBINSKI VLADIMIR;CHUANG YUNG-HO ALEX;ARMSTRONG J. JOSEPH;FIELDEN JOHN 发明人 DRIBINSKI VLADIMIR;CHUANG YUNG-HO ALEX;ARMSTRONG J. JOSEPH;FIELDEN JOHN
分类号 G01N21/94;C03B25/00;G01N21/88;G02F1/35;H01S3/098 主分类号 G01N21/94
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