发明名称 PROCESSING INDICATING DEVICE, PROCESSING INDICATING METHOD, COMPUTER PROGRAM AND PROCESSING DEVICE
摘要 Provided is a processing indicating device capable of improving the efficiency of processing on an object to be processed. A processing indicating device is provided with: a first communication means which communicates information with a plurality of processing devices (2) for processing an object to be processed; a second communication means which communicates information with a conveyance controlling device (31) for controlling the operation of a conveying device (32) for conveying the object to be processed to the plurality of processing devices (2); an arrival time predicting means which, on the basis of information received by the second communication means, predicts the time when the conveying device (32) arrives at one of the processing devices (2); a finish time predicting means which receives information indicating that processing on the object to be processed in the one processing device (2) has finished by the first communication means, or on the basis of received information, predicts the time when the processing on the object to be processed in the one processing device (2) finishes; and a processing indicating means which, on the basis of the predicted respective times, causes processing control information that orders the execution of device state improvement processing to be transmitted to the one processing device (2).
申请公布号 WO2013011920(A1) 申请公布日期 2013.01.24
申请号 WO2012JP67831 申请日期 2012.07.12
申请人 TOKYO ELECTRON LIMITED;ASAKAWA, TERUO;YAMAGUCHI, HIROFUMI;MASHIRO, SUPIKA;IIJIMA, TOSHIHIKO;NARISAWA, HIROKAZU;FUJIMURA, KOU 发明人 ASAKAWA, TERUO;YAMAGUCHI, HIROFUMI;MASHIRO, SUPIKA;IIJIMA, TOSHIHIKO;NARISAWA, HIROKAZU;FUJIMURA, KOU
分类号 G05B19/418 主分类号 G05B19/418
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