ADSORPTION DEVICE AND PROCESSING DEVICE

摘要

[Problem] To provide an adsorption device that can easily adsorb and fix objects to be adsorbed that have differing sizes with high work efficiency, and a processing device equipped with the adsorption device. [Solution] The adsorption device is provided with an adsorption part (61) that adsorbs a film material (2) using differential pressure. The adsorption part (61) is divided into multiple adsorption regions (62a-62d), each of which is capable of independent adsorption actions. Vacuum exhaust lines (13a-13d) and gas supply lines (16a-16d) are communicably connected to each of the adsorption regions (62a-62d). Respective on-off valves (14a-14d, 17a-17d) are provided on the vacuum exhaust lines (13a-13d) and gas supply lines (16a-16d).