METAL WITH DIAMOND-LIKE CARBON FILM, AND METHOD FOR FORMING DIAMOND-LIKE CARBON FILM

摘要

The present invention addresses the problem of providing a metal with a diamond-like carbon film easily obtained by forming a diamond-like carbon film on a metal, and of providing a method for forming the diamond-like carbon film. A metal object on which the diamond-like carbon film is to be formed (30) is arranged in a flow channel (14) where the gas (RG), including methane gas, used for forming the film is directed. The gas (RG) used for forming the film is directed in a prescribed flow quantity through the flow channel (14) at the same time that the object on which the film is to be formed (30) is heated from room temperature to a predetermined temperature, whereby a reaction is created between impurities on the surface (30f) of the object on which the film is to be formed and the gas (RG) used for forming the film, resulting in removal of the impurities from the surface (30f) of the object on which the film is to be formed, and further causing a reaction from the gas (RG) used for forming the film in response to the metal elements exposed by removal of the impurities, forming the diamond-like carbon film (34) on the surface (30f) of the object on which the film is to be formed.