CURRENT LIMITER FOR HIGH VOLTAGE POWER SUPPLY USED WITH ION IMPLANTATION SYSTEM
摘要
<p>Disclosed is a surge protection system for use with an ion source assembly. The system comprises a high voltage power source coupled in series with a thermionic diode or a thermionic triode and an ion source assembly. The high voltage power supply is enclosed in the pressure tank and drives the ion source assembly. The thermionic diode or triode is comprised of an insulating tube disposed between the ion source assembly enclosure and the output of the high voltage power supply and makes use of existing ion source assembly components to limit damage to the power supply during are failures of the ion source assembly..</p>
申请公布号
WO2013013086(A1)
申请公布日期
2013.01.24
申请号
WO2012US47469
申请日期
2012.07.19
申请人
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.;BECKER, KLAUS;PETRY, KLAUS;LUBICKI, PIOTR