| 摘要 |
A vacuum deposition apparatus comprising an enclosure adapted to receive a substrate to be treated and placed under a vacuum; at least one injector that generates a molecular beam of vapor of an organic material the injector comprising a conduit located inside the enclosure and traversing an injection wall of the enclosure to form an outer nozzle adapted in such a manner as to be hermetically connected in a detachable manner to an organic material supply, wherein the supply is a bottle whose neck is adapted to be introduced into the nozzle; an outer heating apparatus located on both sides of an injection wall and surrounding the bottle; an inner heating apparatus surrounding the conduit; and a regulatable valve permitting regulation of conductance of the injector in the enclosure. |
